ClONO2
J83
GAS DECK DP DEF OF THE
O3 MASS FLOW CONTROLLER
C-15
(12-13-95)
| 1. |
| 2. |
OznFl |
J80-19 |
| 3. |
/O3VLVCLOSED |
| 4. |
/O3VLVOPEN |
| 5. |
ANA GND |
FANOUT |
| 6. |
-15V. |
FANOUT |
| 7. |
+15V. |
FANOUT |
| 8. |
O3 FLOW CONTROL |
J80-18 |
| 9. |
| 10. |
| 11. |
ANA GND |
FANOUT,J80-49 |
| 12. |
ANA GND |
FANOUT |
| 13. |
| 14. |
| 15. |
CHASSIS GND |
N.C. |