ClONO2
J86
GAS DECK DP DEF OF THE
NO2 MASS FLOW CONTROLLER
C-15
(12-13-95)
| 1. |
| 2. |
NO2Fl |
J81-22 |
| 3. |
/NO2VLVCLOSED |
| 4. |
/NO2VLVOPEN |
| 5. |
ANA GND |
FANOUT |
| 6. |
-15V. |
FANOUT |
| 7. |
+15V. |
FANOUT |
| 8. |
NO2 FLOW CONTROL |
J81-21 |
| 9. |
| 10. |
| 11. |
ANA GND |
FANOUT,J81-50 |
| 12. |
ANA GND |
FANOUT |
| 13. |
| 14. |
| 15. |
CHASSIS GND |
N.C. |